26th Australian Institute of Physics Congress and the Australian and New Zealand Conference on Optics and Photonics

Circular Nanoscale Vacuum Channel Arrays for Controlled Planar Electron Emission in Miniaturized Vacuum Systems

Not scheduled

20m

Belinda Hutchinson Building (The University of Sydney )

Poster COMMAD - Optoelectronic and Microelectronic Materials and Devices Afternoon Tea and Poster Session 2

Description

The rapid advancement of integrated vacuum electronic systems is creating demand for electron sources that combine compactness, stability, and precise emission control while operating at low power. While conventional field emitters based on materials such as Si, Mo, W, LaB6, and carbon nanotubes (CNTs) have demonstrated emission capabilities, their vertical architecture and high-voltage operation limit integration into next-generation compact electron-beam platforms.
In this work, we present a planar electron emission architecture based on circular arrays of nanoscale vacuum channel devices (NVCDs), enabling electron transport through lithographically defined nanometer-scale vacuum gaps. Unlike conventional vertical emitters, the lateral emitter–gate configuration provides localized electric-field control, while the circular electrode geometry generates radial field components that promote electron focusing toward the device axis, offering a pathway toward compact and confined electron beams.
The simulated electric-field distribution and electron extraction characteristics were investigated, revealing effective field enhancement within the vacuum channels and vertical electron acceleration under applied anode bias. The proposed NVCD arrays were fabricated on sapphire substrates using electron-beam lithography (EBL), followed by Ti/Au metallization and lift-off processes to define nanoscale planar electrodes.
Initial emission measurements performed under high vacuum (~10-6 Torr) demonstrated voltage-dependent current enhancement during a bias sweep from 0 to 30 V, indicating the onset of field-emission-driven electron transport. The observed emission response, combined with the planar and scalable fabrication approach, highlights circular NVCD arrays as promising candidates for integrated vacuum microelectronic systems, including miniaturized electron sources and next-generation electron-beam devices. Future efforts will focus on improving emission stability, beam characteristics, and device scalability.