2026 CAP Congress / Congrès de l'ACP 2026

Session

(DPMB) T3-8 | (DPMB)

T3-8

23 Jun 2026, 16:15

U. Ottawa - Learning Crossroads (CRX) Building

1023. Characterization of Microwave PECVD Plasmas for Diamond Film Deposition

Michael Bradley

Physics in Medicine and Biology / Physique en médecine et en biologie (DPMB-DPMB)

Oral (Non-Student) / Orale (non-étudiant(e))

Microwave Plasma Enhanced Chemical Vapour Deposition (PECVD) is a versatile technique for thin film deposition. Our group has been developing this technique for deposition of diamond thin films for a variety of applications including quantum applications of the diamond NV- centre, thermal transport layers for semiconductor layers, and nuclear battery applications.
The characterization of the...