1–5 Sept 2008
University of Glasgow
Europe/London timezone

Optical & Electrical Characterization of a backthinned CMOS Active Pixel Sensor

2 Sept 2008, 15:10
1h
University of Glasgow

University of Glasgow

Glasgow G12 8QQ UK
Board: 9

Speaker

Dr Andrew Blue (University of Glasgow)

Description

This work will report on the first work on the characterisation of a backthinned Vanilla - a 512x512 (25um squared) active pixel sensor. For some time, it has been predicted that the removal of the supporting substrate section of the sensor to allow detection via direct backside illumination would result in many potential benefits to applications in fields such as particle physics (lower mass) and biomedical science (enhanced UV detection). However, whilst common practice in CCDs, such backthinning techniques have been rarely used on Active Pixel Sensors In this work, on wafer Vanilla sensors were backthinned (by E2V) to within a few microns into the epi-layer. Characterisation of the detectors was carried out through the analysis of Photon Transfer Curves to yield a measurement of full well capacity, noise levels, gain constants and linearity. Spectral characterisation of the sensors was also performed in the Visible and UV regions. A full comparison against non backthinned front illuminated Vanilla sensors is included.

Author

Dr Andrew Blue (University of Glasgow)

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