Speaker
Description
This study explores the effects of localized modifications induced by micrometric ion and electron beams. Using our unique state-of-the-art PELIICAEN set-up [1,2], our work sheds light on innovative surface structuring phenomena through the control of local disorder, charge deposition and deposited power density. These transformations, resulting from complex interactions between beam and substrate, include defect accumulation, diffusion, atomic redistribution and local modification of chemical bonds.
The experimental approach relies on precise control of the flux, fluence and energy parameters of focused charged particle beams, enabling the nature and extent of the induced modifications to be finely tuned. New aspects of interpretation of the observed phenomena will be addressed to provide detailed insight into the underlying mechanisms, paving the way for a better understanding of the processes involved in the micro-nano-structuring of materials. We specifically illustrate the feasibility of generating surface protrusions on a material in a controlled manner by element implantation and defect creation. By adjusting the parameters of the focused beams, we control parameters such as local temperature elevation, charge accumulation and the coalescence of implanted elements, facilitating the formation of gas-filled hollow structures. In an ultra-high vacuum environment (10⁻⁹ mbar), we demonstrate the feasibility of producing quasi-spherical hollow structures measuring 1 µm in diameter in HOPG which contain implanted elements, and possess walls thicknesses of less than 10 nm, alongside structures nearly 3 µm in height obtained in silicon. Local cathodoluminescence properties induced by the creation of these structures will be discussed.
The results obtained demonstrate the potential of these techniques for nano-fabrication and surface engineering, offering tailor-made solutions for the development of high-performance devices. This study enhances comprehension of beam-matter interactions, and offers new perspectives for integrating these processes into technology applications.