Speaker
Description
Atomic Force Microscopy (AFM) has emerged as an indispensable research and development tool for imaging and analyses down to the lowest nanoscale. Employing a sharp probe affixed to a cantilever, AFM achieves (sub-)nanometer resolution by raster scanning across a sample surface, effectively circumvent-ing Abbe's limit. This remarkable capability extends to various atmospheres, vacuum and even liquid environments, making AFM extremely flexible in application. Advanced operation modes and functional-ized probes enable comprehensive investigations beyond surface topography, encompassing electrical, mechanical, optical, mechanical, thermal, and magnetic properties. However, traditional probe function-alization methods involving coatings often compromise resolution due to increased apex radii and pose the risk of delamination, potentially rendering the probe ineffective or entirely useless. An innovative approach to creating functional probes circumvents these limitations through Focused Electron Beam Induced Deposition (FEBID)-based 3D nanoprinting, as demonstrated for thermal, optical, electrical and magnetic properties.
Here, we demonstrate the first FUSION-probe concept, which combines magnetic (MFM) and electrical capabilities (CAFM), termed MC Fusion Probe. We hereby aim at improving correlative microscopy by eliminating the need to change between different probes, not only to safe time but, more importantly, to eliminated the time consuming and often challenging rediscover of highly localized regions of interest even without fiducials. The main hurdle of this integration process is the fact, that CAFM is performed in contact mode employing a soft cantilever, while MFM uses an oscillating cantilever intermittently tapping the sample surface which requires a stiffer cantilever for stable operation. This in turn increases contact forces in contact mode, raising mechanical demands of the probe. Our probe concept is fabricated via FEBID from a Co$_3$Fe precursor, yielding a highly crystalline microstructure with minor C and O residues. These probes have recently demonstrated superior and long-lasting MFM performance, and due to their purity should be conductive as well. As a first step, wear tests were carried out to confine the range of cantilever spring constants for reliable operation in both AFM modes. Subsequently, the probe concept was adapted to self-sensing cantilever systems enabling application in Quantum Design Microscopy’s FUSIONScope™, a deeply integrated SEM-AFM system. In combination with the already patented Simulta-neous Measurement Operation (SMO) ideal surroundings are established to operate the MC Probe to its full potential, seamlessly adding measurement capabilities without the need to switch between probes, which is illustrated on different samples. Thus, we unveil a sophisticated FEBID-based, multi-functional probe concept, poised to elevate correlative microscopy to new heights, with additional groundbreaking concepts on the future horizon.