Speaker
Zephyr Rosenblod
Description
We investigated the effect ozone has on the ALD of HfO2 on top of Si substrates, where typically water has been used as a co-reactant. Curiously, despite the potential of ozone, we discovered that molecular oxygen is also a strong co-reactant. By varying temperature and following ambient pressure reactions in real time using PES, we distinguish the subtle contributions of O2 and O3 in ALD chemistry at the surface. This is the first use ozone together with the ALD setup at the SPECIES beamline of MAX IV in Lund, Sweden and promises increased opportunities for future users of the facility.
Author
Zephyr Rosenblod
Co-authors
Dr
Rosemary Jones
(MAX IV)
Dr
Ville Miikkulainen
(Aalto University)
Dr
Joachim Schnadt
Dr
Esko Kokkonen
(MAX IV)