Speaker
Tim Ziemba
Description
Eagle Harbor Technologies (EHT), Inc. is developing radio-frequency (RF) solid-state switching power supplies without the need for a 50-ohm matching network. The ability to remove the 50-ohm matching network from RF plasma generation systems significantly simplifies the design while allowing for a faster response time to changing plasma conditions. This system takes advantage of EHT’s previously developed full-bridge circuit to drive a resonant load. These systems can be designed to operate from 100 kHz to tens of megahertz. This power system has applications in semiconductor processing, fusion energy science, material science, and basic plasma physics. EHT will present circuit modeling, diagrams, and waveforms.
Authors
Tim Ziemba
James Prager
(Eagle Harbor Technologies, Inc.)
Dr
Kenneth E. Miller
(Eagle Harbor Technologies, Inc)
