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Although gas breakdown for radiofrequency (RF) and microwaves has been extensively studied, a consistent and accurate model for AC breakdown voltage independent of unknown fitting parameters remains incomplete. While the RF breakdown model derived by Kihara theoretically justifies a fitting parameter based on various molecular constants, the magnitude used to match experimental results differs [1].
This study aims to elucidate the physical meaning behind the material parameter and derive a relationship dependent on frequency and pressure. We measured breakdown voltage at 0.38, 0.76, and 1.52 Torr for argon at a ~1 cm gap with frequencies of 96, 140, and 191 MHz and helium at a ~0.8 cm gap and frequencies of 92, 140, and 185 MHz. By using Kihara’s RF equation [1] to fit the data, we demonstrate how the fitting parameter depends on the different experimental parameters, elucidating the underlying physical mechanisms involved.
- T. Kihara, “The mathematical theory of electrical discharges in gases,” Rev. Mod. Phys., vol. 24, pp. 45-61, 1952.
