Speaker
Alex Chang
(University of Saskatchewan Plasma Physics Lab)
Description
In this poster we present a new pulsed-target magnetron-enhanced plasma system, with applications in plasma materials processing and fundamental plasma physics. This system embeds a high-density magnetron discharge within a relatively uniform medium-density Inductively Coupled Plasma (ICP). We report on experimental studies of this unique plasma system using an RF-compensated Langmuir probe for plasma density and electron temperature measurements, as well as a high-speed camera to capture rapidly moving plasma structures. Preliminary modelling results using the VSim PIC simulation code will also be presented.
Authors
Alex Chang
(University of Saskatchewan Plasma Physics Lab)
Ayub Khodaee
(University of Saskatchewan Plasma Physics Lab)
Joel Moreno
(University of Saskatchewan Plasma Physics Lab)
Prof.
Lenaic Couedel
(University of Saskatchewan Plasma Physics Lab)
Prof.
Michael Bradley
(University of Saskatchewan Plasma Physics Lab)
